dc.contributor.author | Mebendale, M. | |
dc.contributor.author | Kotelyanskii, M. | |
dc.contributor.author | Mair, R. | |
dc.contributor.author | Mukundhan, P. | |
dc.contributor.author | Bogdanowicz, Janusz | |
dc.contributor.author | Teugels, Lieve | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Kuszewski, Piotr | |
dc.date.accessioned | 2021-12-08T10:17:19Z | |
dc.date.available | 2021-11-02T16:02:22Z | |
dc.date.available | 2021-12-08T10:17:19Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1078-8743 | |
dc.identifier.other | WOS:000631799000022 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37980.2 | |
dc.source | WOS | |
dc.title | Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Bogdanowicz, J. | |
dc.contributor.imecauthor | Teugels, L. | |
dc.contributor.imecauthor | Charley, A. L. | |
dc.contributor.imecauthor | Kuszewski, P. | |
dc.contributor.imecauthor | Bogdanowicz, Janusz | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Kuszewski, Piotr | |
dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.identifier.eisbn | 978-1-7281-5876-1 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | |
dc.source.conferencedate | AUG 24-26, 2020 | |
dc.source.conferencelocation | Saratoga Springs | |
dc.source.journal | na | |
imec.availability | Published - imec | |