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Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics
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Authors
Mebendale, M.
;
Kotelyanskii, M.
;
Mair, R.
;
Mukundhan, P.
;
Bogdanowicz, Janusz
;
Teugels, Lieve
;
Charley, Anne-Laure
;
Kuszewski, Piotr
EISBN
978-1-7281-5876-1
ISSN
1078-8743
Conference
31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Journal
na
Title
Characterization of Sub-micron Metal Line Arrays Using Picosecond Ultrasonics
Publication type
Proceedings paper
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2
20.500.12860/37980.2
*
2021-12-08T10:15:28Z
validation by library/open access desk
1
20.500.12860/37980
2021-11-02T16:02:22Z
*Selected version
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