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In-device high resolution and high throughput optical metrology for process development and monitoring
dc.contributor.author | Sah, Kaushik | |
dc.contributor.author | Li, Shifang | |
dc.contributor.author | Das, Sayantan | |
dc.contributor.author | Halder, Sandip | |
dc.contributor.author | Cross, Andrew | |
dc.date.accessioned | 2021-11-02T16:02:23Z | |
dc.date.available | 2021-11-02T16:02:23Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1078-8743 | |
dc.identifier.other | WOS:000631799000017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37981 | |
dc.source | WOS | |
dc.title | In-device high resolution and high throughput optical metrology for process development and monitoring | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Das, Sayantan | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.orcidimec | Das, Sayantan::0000-0002-3031-0726 | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.identifier.eisbn | 978-1-7281-5876-1 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.conference | 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) | |
dc.source.conferencedate | AUG 24-26, 2020 | |
dc.source.conferencelocation | Saratoga Springs | |
imec.availability | Under review |
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