Publication:

A Novel Main Chain Scission Type Photoresists for EUV Lithography

Date

2020

Proceedings Paper

https://doi.org/10.1117/12.2572582

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Author(s)

;

;

De Simone, Danilo

;

Vandenberghe, Geert

;

Journal

Proceedings of SPIE

Statistics

1842 since deposited on 2021-11-02

Acq. date: 2026-03-17