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Demonstration of a collective hybrid die-to-wafer integration
dc.contributor.author | Suhard, Samuel | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | Kennes, Koen | |
dc.contributor.author | Bex, Pieter | |
dc.contributor.author | Fodor, Ferenc | |
dc.contributor.author | Slabbekoorn, Maarten Liebens John | |
dc.contributor.author | Miller, Andy | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-11-02T16:04:36Z | |
dc.date.available | 2021-11-02T16:04:36Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0569-5503 | |
dc.identifier.other | WOS:000620983200196 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38151 | |
dc.source | WOS | |
dc.title | Demonstration of a collective hybrid die-to-wafer integration | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Suhard, Samuel | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | Kennes, Koen | |
dc.contributor.imecauthor | Bex, Pieter | |
dc.contributor.imecauthor | Fodor, Ferenc | |
dc.contributor.imecauthor | Slabbekoorn, Maarten Liebens John | |
dc.contributor.imecauthor | Miller, Andy | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | Bex, Pieter::0000-0003-0896-2514 | |
dc.identifier.doi | 10.1109/ECTC32862.2020.00208 | |
dc.identifier.eisbn | 978-1-7281-6180-8 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1315 | |
dc.source.endpage | 1321 | |
dc.source.conference | 70th IEEE Electronic Components and Technology Conference (ECTC) | |
dc.source.conferencedate | JUN 03-30, 2020 | |
imec.availability | Under review |
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