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Polycrystalline silicon germanium as a structural material for surface micromachining

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorDe Moor, Piet
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-14T11:38:14Z
dc.date.available2021-10-14T11:38:14Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3815
dc.sourceIIOimport
dc.titlePolycrystalline silicon germanium as a structural material for surface micromachining
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage492
dc.source.endpage495
dc.source.conferenceProceedings 10th International Conference on Solid State Sensors and Actuators - Transducers
dc.source.conferencedate6/06/1999
dc.source.conferencelocationJapan Sendai
imec.availabilityPublished - open access


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