Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics

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dc.contributor.author	Edinger, Pierre
dc.contributor.author	Errando-Herranz, Carlos
dc.contributor.author	Takabayashi, Alain Yuji
dc.contributor.author	Sattari, Hamed
dc.contributor.author	Quack, Niels
dc.contributor.author	Verheyen, Peter
dc.contributor.author	Bogaerts, Wim
dc.contributor.author	Gylfason, Kristinn B.
dc.date.accessioned	2021-11-02T16:04:46Z
dc.date.available	2021-11-02T16:04:46Z
dc.date.issued	2020
dc.identifier.issn	2160-9020
dc.identifier.other	WOS:000612090002011
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/38160
dc.source	WOS
dc.title	Compact low loss MEMS phase shifters for scalable field-programmable silicon photonics
dc.type	Proceedings paper
dc.identifier.eisbn	978-1-943580-76-7
dc.source.numberofpages	2
dc.source.peerreview	yes
dc.source.conference	Conference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedate	MAY 10-15, 2020
dc.source.conferencelocation	San Jose
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/38160.2	2021-12-15T09:09:22Z	validation by library/open access desk
1	20.500.12860/38160*	2021-11-02T16:04:46Z