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Analysis of the structural properties of polycrystalline silicon germanium films

dc.contributor.authorSedky, Sherif
dc.contributor.authorFiorini, Paolo
dc.contributor.authorLoreti, S.
dc.contributor.authorCaymax, Matty
dc.contributor.authorBaert, Kris
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-14T11:38:18Z
dc.date.available2021-10-14T11:38:18Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3816
dc.sourceIIOimport
dc.titleAnalysis of the structural properties of polycrystalline silicon germanium films
dc.typeProceedings paper
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVan Hoof, Chris
dc.source.peerreviewno
dc.source.beginpage67
dc.source.endpage70
dc.source.conferenceICM'99. The eleventh international conference on microelectronics. Proceedings;
dc.source.conferencelocation
imec.availabilityPublished - imec


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