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On the impact of mechanical stress on gate oxide trapping
dc.contributor.author | Kruv, A. | |
dc.contributor.author | Kaczer, B. | |
dc.contributor.author | Grill, A. | |
dc.contributor.author | Gonzalez, M. | |
dc.contributor.author | Franco, J. | |
dc.contributor.author | Linten, D. | |
dc.contributor.author | Goes, W. | |
dc.contributor.author | Grasser, T. | |
dc.contributor.author | De Wolf, I | |
dc.date.accessioned | 2021-11-02T16:05:40Z | |
dc.date.available | 2021-11-02T16:05:40Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 1541-7026 | |
dc.identifier.other | WOS:000612717200161 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38217 | |
dc.source | WOS | |
dc.title | On the impact of mechanical stress on gate oxide trapping | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Kruv, A. | |
dc.contributor.imecauthor | Kaczer, B. | |
dc.contributor.imecauthor | Grill, A. | |
dc.contributor.imecauthor | Gonzalez, M. | |
dc.contributor.imecauthor | Franco, J. | |
dc.contributor.imecauthor | Linten, D. | |
dc.contributor.imecauthor | De Wolf, I | |
dc.identifier.eisbn | 978-1-7281-3199-3 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Reliability Physics Symposium (IRPS) | |
dc.source.conferencedate | APR 28-MAY 30, 2020 | |
imec.availability | Under review |
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