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Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
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Authors
Lee, Kookjin
;
Kim, Yeonsu
;
Lee, Hyebin
;
Park, Sojeong
;
Lee, Yongwoo
;
Joo, Min-Kyu
;
Ji, Hyunjin
;
Lee, Jaewoo
;
Chun, Jungu
;
Sung, Moonsoo
;
Cho, Young-Hoon
;
Kim, Doyoon
;
Choi, Junhee
;
Lee, Jae Woo
;
Jeon, Dae-Young
;
Choi, Sung-Jin
;
Kim, Gyu-Tae
DOI
10.1088/1361-6528/abd278
ISSN
0957-4484
PMID
MEDLINE:33302263
Issue
16
Journal
NANOTECHNOLOGY
Volume
32
Title
Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
Publication type
Journal article
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2
20.500.12860/38229.2
*
2022-09-22T13:42:35Z
validation by library/open access desk
1
20.500.12860/38229
2021-11-02T16:05:48Z
*Selected version
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