Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/38229.2
Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
dc.contributor.author | Lee, Kookjin | |
dc.contributor.author | Kim, Yeonsu | |
dc.contributor.author | Lee, Hyebin | |
dc.contributor.author | Park, Sojeong | |
dc.contributor.author | Lee, Yongwoo | |
dc.contributor.author | Joo, Min-Kyu | |
dc.contributor.author | Ji, Hyunjin | |
dc.contributor.author | Lee, Jaewoo | |
dc.contributor.author | Chun, Jungu | |
dc.contributor.author | Sung, Moonsoo | |
dc.contributor.author | Cho, Young-Hoon | |
dc.contributor.author | Kim, Doyoon | |
dc.contributor.author | Choi, Junhee | |
dc.contributor.author | Lee, Jae Woo | |
dc.contributor.author | Jeon, Dae-Young | |
dc.contributor.author | Choi, Sung-Jin | |
dc.contributor.author | Kim, Gyu-Tae | |
dc.date.accessioned | 2021-11-02T16:05:48Z | |
dc.date.available | 2021-11-02T16:05:48Z | |
dc.date.issued | 2021-APR 16 | |
dc.identifier.issn | 0957-4484 | |
dc.identifier.other | WOS:000614058600001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38229 | |
dc.source | WOS | |
dc.title | Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET | |
dc.type | Journal article | |
dc.contributor.imecauthor | Lee, Kookjin | |
dc.contributor.orcidext | Lee, Yongwoo::0000-0003-3224-1960 | |
dc.contributor.orcidext | Joo, Min-Kyu::0000-0001-7537-1015 | |
dc.contributor.orcidimec | Lee, Kookjin::0000-0002-9896-1090 | |
dc.identifier.doi | 10.1088/1361-6528/abd278 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.journal | NANOTECHNOLOGY | |
dc.identifier.pmid | MEDLINE:33302263 | |
dc.source.issue | 16 | |
dc.source.volume | 32 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |