Process-induced V-t variability in nanoscale FinFETs: Does V-t extraction methods have any impact?

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dc.contributor.author	Bhoir, Mandar S.
dc.contributor.author	Chiarella, Thomas
dc.contributor.author	Ragnarsson, Lars-Ake
dc.contributor.author	Mitard, Jerome
dc.contributor.author	Horiguchi, Naoto
dc.contributor.author	Mohapatra, Nihar R.
dc.date.accessioned	2021-11-02T16:05:56Z
dc.date.available	2021-11-02T16:05:56Z
dc.date.issued	2020
dc.identifier.other	WOS:000610825100013
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/38240
dc.source	WOS
dc.title	Process-induced V-t variability in nanoscale FinFETs: Does V-t extraction methods have any impact?
dc.type	Proceedings paper
dc.contributor.imecauthor	Chiarella, Thomas
dc.contributor.imecauthor	Ragnarsson, Lars-Ake
dc.contributor.imecauthor	Mitard, Jerome
dc.contributor.imecauthor	Horiguchi, Naoto
dc.contributor.orcidimec	Chiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimec	Mitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimec	Horiguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimec	Ragnarsson, Lars-Ake::0000-0003-1057-8140
dc.identifier.eisbn	978-1-7281-2539-8
dc.source.numberofpages	4
dc.source.peerreview	yes
dc.source.conference	IEEE Electron Devices Technology and Manufacturing Conference (EDTM)
dc.source.conferencedate	MAR 16-18, 2020
imec.availability	Under review

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Version	Item	Date	Summary
2	20.500.12860/38240.2	2022-01-20T10:17:20Z	validation by library/open access desk
1	20.500.12860/38240*	2021-11-02T16:05:56Z