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Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving
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Authors
Jeong, Yongbin
;
Genoe, Jan
;
Gijsenbergh, Pieter
;
Segers, Jeremy
;
Heremans, Paul
;
Cheyns, David
DOI
10.1109/JMEMS.2020.3043052
ISSN
1057-7157
Issue
1
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume
30
Title
Fully Flexible PMUT Based on Polymer Materials and Stress Compensation by Adaptive Frequency Driving
Publication type
Journal article
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3
20.500.12860/38262.3
*
2021-11-17T09:47:46Z
validation by library/open access desk
2
20.500.12860/38262.2
2021-11-03T19:01:33Z
validation by imec author
1
20.500.12860/38262
2021-11-02T16:06:16Z
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