dc.contributor.author | Grillo, Fabio | |
dc.contributor.author | Soethoudt, Job | |
dc.contributor.author | Marques, Esteban | |
dc.contributor.author | de Martin, Lilian | |
dc.contributor.author | Van Dongen, Kaat | |
dc.contributor.author | van Ommen, J. Ruud | |
dc.contributor.author | Delabie, Annelies | |
dc.date.accessioned | 2022-01-06T12:45:06Z | |
dc.date.available | 2021-11-02T16:06:30Z | |
dc.date.available | 2022-01-06T12:45:06Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0897-4756 | |
dc.identifier.other | WOS:000595526400008 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38282.2 | |
dc.source | WOS | |
dc.title | Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion | |
dc.type | Journal article | |
dc.contributor.imecauthor | Soethoudt, Job | |
dc.contributor.imecauthor | Marques, Esteban A. | |
dc.contributor.imecauthor | Van Dongen, Kaat | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Marques, Esteban | |
dc.contributor.orcidext | Grillo, Fabio::0000-0003-1486-3117 | |
dc.contributor.orcidext | van Ommen, J. Ruud::0000-0001-7884-0323 | |
dc.contributor.orcidimec | Marques, Esteban A.::0000-0003-0322-3827 | |
dc.identifier.doi | 10.1021/acs.chemmater.0c02588 | |
dc.source.numberofpages | 13 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 9560 | |
dc.source.endpage | 9572 | |
dc.source.journal | CHEMISTRY OF MATERIALS | |
dc.source.issue | 22 | |
dc.source.volume | 32 | |
imec.availability | Published - imec | |