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Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
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Authors
Grillo, Fabio
;
Soethoudt, Job
;
Marques, Esteban
;
de Martin, Lilian
;
Van Dongen, Kaat
;
van Ommen, J. Ruud
;
Delabie, Annelies
DOI
10.1021/acs.chemmater.0c02588
ISSN
0897-4756
Issue
22
Journal
CHEMISTRY OF MATERIALS
Volume
32
Title
Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
Publication type
Journal article
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2
20.500.12860/38282.2
*
2022-01-06T12:42:39Z
validation by library/open access desk
1
20.500.12860/38282
2021-11-02T16:06:30Z
*Selected version
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