Browsing by author "Grillo, Fabio"
Now showing items 1-8 of 8
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Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
Grillo, Fabio; Soethoudt, Job; Marques, Esteban; de Martin, Lilian; Van Dongen, Kaat; van Ommen, J. Ruud; Delabie, Annelies (2020) -
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies (2019) -
Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies (2018) -
Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018) -
From fundamental insights into growth and nucleation mechanisms to area-selective deposition
Delabie, Annelies; Soethoudt, Job; Pourtois, Geoffrey; Van Elshocht, Sven; Barla, Kathy; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud (2018) -
Insight in growth mechanism of Ru ALD on dielectrics
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Hody, Hubert; Marques, Esteban; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018) -
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
Grillo, Fabio; Van Ommen, Ruud; Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Pourtois, Geoffrey; Delabie, Annelies (2021-08-11) -
Surface diffusion for defect mitigation during area-selective deposition of Ru
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Hody, Hubert; Delabie, Annelies (2019)