Authors

Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies

ISSN

2196-7350

Issue

24

Journal

Advanced Materials Interfaces

Volume

5

Title

Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

Publication type

Journal article