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Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

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1946 since deposited on 2021-10-26
5last month
2last week
Acq. date: 2026-08-10

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1946 since deposited on 2021-10-26
5last month
2last week
Acq. date: 2026-08-10

Citations