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Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
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Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Soethoudt, Job
;
Grillo, Fabio
;
Marques, Esteban
;
Van Ommen, Ruud
;
Tomczak, Yoann
;
Nyns, Laura
;
Van Elshocht, Sven
;
Delabie, Annelies
Journal
Advanced Materials Interfaces
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1936
since deposited on 2021-10-26
1
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Acq. date: 2025-12-15
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Metrics
Views
1936
since deposited on 2021-10-26
1
last month
Acq. date: 2025-12-15
Citations