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Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
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1941 since deposited on 2021-10-26
1last month
Acq. date: 2026-04-27
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Statistics
Views
1941 since deposited on 2021-10-26
1last month
Acq. date: 2026-04-27
Citations