Publication:

Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

Date

2018
Journal article
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dc.contributor.authorSoethoudt, Job
dc.contributor.authorGrillo, Fabio
dc.contributor.authorMarques, Esteban
dc.contributor.authorVan Ommen, Ruud
dc.contributor.authorTomczak, Yoann
dc.contributor.authorNyns, Laura
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorMarques, Esteban
dc.contributor.imecauthorTomczak, Yoann
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-26T04:24:06Z
dc.date.available2021-10-26T04:24:06Z
dc.date.issued2018
dc.identifier.issn2196-7350
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31829
dc.identifier.urlhttps://onlinelibrary.wiley.com/doi/abs/10.1002/admi.201800870
dc.source.beginpage1800870
dc.source.issue24
dc.source.journalAdvanced Materials Interfaces
dc.source.volume5
dc.title

Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

dc.typeJournal article
dspace.entity.typePublication
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