Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns

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Authors
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies
Conference
ALD 2019
Title
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Publication type
Oral presentation
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