Publication:
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
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2044 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-15
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Views
2044 since deposited on 2021-10-27
1last month
Acq. date: 2025-12-15
Citations