Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics

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Authors
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies
Conference
Area Selective Deposition Workshop - ASD
Title
Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics
Publication type
Meeting abstract
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