Publication:
Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.author | Tomczak, Yoann | |
| dc.contributor.author | Grillo, Fabio | |
| dc.contributor.author | Van Ommen, Ruud | |
| dc.contributor.author | Altamirano Sanchez, Efrain | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.imecauthor | Tomczak, Yoann | |
| dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-26T04:25:23Z | |
| dc.date.available | 2021-10-26T04:25:23Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31831 | |
| dc.source.conference | Area Selective Deposition Workshop - ASD | |
| dc.source.conferencedate | 29/04/2018 | |
| dc.source.conferencelocation | Raleigh, NC USA | |
| dc.title | Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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