Insight in growth mechanism of Ru ALD on dielectrics

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Authors
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Hody, Hubert; Marques, Esteban; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies
Conference
18th International Conference on Atomic Layer Deposition - ALD
Title
Insight in growth mechanism of Ru ALD on dielectrics
Publication type
Meeting abstract
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