Browsing by author "Soethoudt, Job"

A method to pattern tight tip-to-tip in 32nm-pitch N5 interconnect using Ru area selective deposition tone inversion process

Briggs, Basoene; Soethoudt, Job; Delabie, Annelies; Wilson, Chris; Tokei, Zsolt; Boemmels, Juergen; Devriendt, Katia; Sebaai, Farid; Lorant, Christophe; Hody, Hubert (2018)

Area selective atomic layer deposition: a bottom-up approach for patterning

Delabie, Annelies; Soethoudt, Job; Tomczak, Yoann; Briggs, Basoene; Chan, BT; Tokei, Zsolt; Van Elshocht, Sven; Altamirano Sanchez, Efrain; Stevens, Eric; Parsons, Gregory, N (2018)

Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion

Grillo, Fabio; Soethoudt, Job; Marques, Esteban; de Martin, Lilian; Van Dongen, Kaat; van Ommen, J. Ruud; Delabie, Annelies (2020)

Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction

Soethoudt, Job; Tomczak, Yoann; Delabie, Annelies (2019)

Bottom-up nanoelectronic device fabrication by Area-Selective Deposition

Soethoudt, Job; Clerix, Jan-Willem; Sanz-Matias, Ana; Harvey, Jeremy; Delabie, Annelies (2018)

Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns

Soethoudt, Job; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Briggs, Basoene; Chan, BT; Delabie, Annelies (2019)

Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns

Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies (2019)

Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates

Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies (2018)

Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics

Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018)

From fundamental insights into growth and nucleation mechanisms to area-selective deposition

Delabie, Annelies; Soethoudt, Job; Pourtois, Geoffrey; Van Elshocht, Sven; Barla, Kathy; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud (2018)

From surface dependence in atomic layer deposition to area-selective deposition of TiN

Delabie, Annelies; Carbajal, Diego; Soethoudt, Job; Chan, BT; Altamirano Sanchez, Efrain; Meynaerts, Ben; Clerix, Jan-Willem; Van Elshocht, Sven (2019)

Hybrid Metallization with Cu in sub 30nm Interconnects

van der Veen, Marleen; Soethoudt, Job; Delabie, Annelies; Varela Pedreira, Olalla; Vega Gonzalez, Victor; Lariviere, Stephane; Teugels, Lieve; Jourdan, Nicolas; Decoster, Stefan; Struyf, Herbert; Wilson, Chris; Croes, Kristof; Tokei, Zsolt (2020)

Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition

Soethoudt, Job; Crahaij, Steven; Conard, Thierry; Delabie, Annelies (2019)

Insight in growth mechanism of Ru ALD on dielectrics

Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Hody, Hubert; Marques, Esteban; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018)

Insight into selective surface reactions of dimethylamino-trimethylsilane for area-selective deposition of metal, ntride, and oxide

Soethoudt, Job; Tomczak, Yoann; Meynaerts, Ben; Chan, BT; Delabie, Annelies (2020)

Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns

Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Delabie, Annelies (2020)

Patterning challenges in 193i-based tip to tip in N5 interconnects

Briggs, Basoene; Versluijs, Janko; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Mallik, Arindam; Soethoudt, Job (2018)

Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity

Grillo, Fabio; Van Ommen, Ruud; Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Pourtois, Geoffrey; Delabie, Annelies (2021-08-11)

Substrate dependence of ruthenium atomic layer deposition

Soethoudt, Job; Tomczak, Yoann; Popovici, Mihaela Ioana; Krishtab, Mikhail; Van Elshocht, Sven; Altamirano Sanchez, Efrain; Delabie, Annelies (2017)

Surface diffusion for defect mitigation during area-selective deposition of Ru

Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Hody, Hubert; Delabie, Annelies (2019)