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Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition
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Authors
Soethoudt, Job
;
Crahaij, Steven
;
Conard, Thierry
;
Delabie, Annelies
ISSN
2050-7526
Issue
38
Journal
Journal of Materials Chemistry C
Volume
7
Title
Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition
Publication type
Journal article
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