Publication:
Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.author | Crahaij, Steven | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-27T18:42:40Z | |
| dc.date.available | 2021-10-27T18:42:40Z | |
| dc.date.issued | 2019 | |
| dc.identifier.issn | 2050-7526 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34039 | |
| dc.identifier.url | https://pubs.rsc.org/en/content/articlelanding/2019/tc/c9tc04091a#!divAbstract | |
| dc.source.beginpage | 11911 | |
| dc.source.endpage | 11918 | |
| dc.source.issue | 38 | |
| dc.source.journal | Journal of Materials Chemistry C | |
| dc.source.volume | 7 | |
| dc.title | Impact of SiO2 surface composition on trimethylsilane passivation for area-selective deposition | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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