Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns

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Authors
Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Delabie, Annelies
Conference
AVS Atomic Layer Deposition Conference
Title
Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns
Publication type
Meeting abstract
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