Publication:

Area selective atomic layer deposition: a bottom-up approach for patterning

Date

2018

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

Delabie, Annelies

;

;

;

Briggs, Basoene

;

;

;

Van Elshocht, Sven

;

Altamirano Sanchez, Efrain

;

;

Parsons, Gregory, N

Statistics

1999 since deposited on 2021-10-25

Acq. date: 2026-09-18