Publication:

Area selective atomic layer deposition: a bottom-up approach for patterning

Date

2018

Meeting abstract

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Author(s)

Delabie, Annelies

;

;

;

Briggs, Basoene

;

;

;

Van Elshocht, Sven

;

Altamirano Sanchez, Efrain

;

;

Parsons, Gregory, N

Statistics

1996 since deposited on 2021-10-25

Acq. date: 2026-02-26