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Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction
Publication:
Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Soethoudt, Job
;
Tomczak, Yoann
;
Delabie, Annelies
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Abstract
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1946
since deposited on 2021-10-27
2
last month
Acq. date: 2026-01-11
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Metrics
Views
1946
since deposited on 2021-10-27
2
last month
Acq. date: 2026-01-11
Citations