Publication:
Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction
Date
| dc.contributor.author | Soethoudt, Job | |
| dc.contributor.author | Tomczak, Yoann | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Soethoudt, Job | |
| dc.contributor.imecauthor | Tomczak, Yoann | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
| dc.date.accessioned | 2021-10-27T18:45:22Z | |
| dc.date.available | 2021-10-27T18:45:22Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/34043 | |
| dc.source.conference | EuroCVD 2019 / Baltic ALD 2019 | |
| dc.source.conferencedate | 24/06/2019 | |
| dc.source.conferencelocation | Luxembourg Luxemburg | |
| dc.title | Area-selective deposition on nanoscale metal/dielectric patterns by surface-dependent dimethylamino-trimethylsilane reaction | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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