Publication:

Substrate dependence of ruthenium atomic layer deposition

Date

2017

Meeting abstract

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35689.pdf 1.06 MB

Author(s)

;

;

Popovici, Mihaela Ioana

;

Krishtab, Mikhail

;

Van Elshocht, Sven

;

Altamirano Sanchez, Efrain

;

Delabie, Annelies

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Acq. date: 2026-09-14