Publication:
Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns
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1932 since deposited on 2021-10-27
2last month
Acq. date: 2026-01-11
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Metrics
Views
1932 since deposited on 2021-10-27
2last month
Acq. date: 2026-01-11
Citations