Authors

Soethoudt, Job; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Briggs, Basoene; Chan, BT; Delabie, Annelies

ISSN

2196-7350

Issue

20

Journal

Advanced Materials Interfaces

Volume

6

Title

Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns

Publication type

Journal article