Publication:
Defect Mitigation in Area-Selective Atomic Layer Deposition of Ruthenium on Titanium Nitride/Dielectric Nanopatterns
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1930 since deposited on 2021-10-27
Acq. date: 2025-12-15
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Views
1930 since deposited on 2021-10-27
Acq. date: 2025-12-15
Citations