Patterning challenges in 193i-based tip to tip in N5 interconnects

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Authors
Briggs, Basoene; Versluijs, Janko; Boemmels, Juergen; Wilson, Chris; Tokei, Zsolt; Mallik, Arindam; Soethoudt, Job
Conference
2018 China Semiconductor Technology International Conference (CSTIC)
Title
Patterning challenges in 193i-based tip to tip in N5 interconnects
Publication type
Proceedings paper
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