Publication:

Patterning challenges in 193i-based tip to tip in N5 interconnects

Date

2018

Proceedings Paper

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Author(s)

Briggs, Basoene

;

Versluijs, Janko

;

Boemmels, Juergen

;

;

;

Mallik, Arindam

;

Statistics

1895 since deposited on 2021-10-25

Acq. date: 2026-02-26