Hybrid Metallization with Cu in sub 30nm Interconnects

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Authors
van der Veen, Marleen; Soethoudt, Job; Delabie, Annelies; Varela Pedreira, Olalla; Vega Gonzalez, Victor; Lariviere, Stephane; Teugels, Lieve; Jourdan, Nicolas; Decoster, Stefan; Struyf, Herbert; Wilson, Chris; Croes, Kristof; Tokei, Zsolt
Conference
23rd IEEE International Interconnect Technology Cconference - IITC 2020
Title
Hybrid Metallization with Cu in sub 30nm Interconnects
Publication type
Proceedings paper
Embargo date
9999-12-31
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