Publication:

Hybrid Metallization with Cu in sub 30nm Interconnects

Date

2020

Proceedings Paper

Simple item page Full metadata Statistics

Files

47198.pdf 663.84 KB

Author(s)

van der Veen, Marleen

;

;

Delabie, Annelies

;

Varela Pedreira, Olalla

;

Vega Gonzalez, Victor

;

Lariviere, Stephane

;

;

Jourdan, Nicolas

;

Decoster, Stefan

;

Struyf, Herbert

;

;

;

Statistics

2101 since deposited on 2021-10-29

Acq. date: 2026-06-06