Publication:

Hybrid Metallization with Cu in sub 30nm Interconnects

Date

2020
Proceedings Paper
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Author(s)

van der Veen, Marleen  
;
Soethoudt, Job  
;
Delabie, Annelies  
;
Varela Pedreira, Olalla  
;
Vega Gonzalez, Victor  
;
Lariviere, Stephane  
;
Teugels, Lieve  
;
Jourdan, Nicolas  
;
Decoster, Stefan  
;
Struyf, Herbert  
;
Wilson, Chris  
;
Croes, Kristof  
;
Tokei, Zsolt  

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