Publication:

Hybrid Metallization with Cu in sub 30nm Interconnects

Date

2020

Proceedings Paper

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Files

47198.pdf 663.84 KB

Author(s)

van der Veen, Marleen

;

;

Delabie, Annelies

;

Varela Pedreira, Olalla

;

Vega Gonzalez, Victor

;

Lariviere, Stephane

;

;

Jourdan, Nicolas

;

Decoster, Stefan

;

Struyf, Herbert

;

;

;

Statistics

2100 since deposited on 2021-10-29

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Acq. date: 2026-04-05