Publication:
A method to pattern tight tip-to-tip in 32nm-pitch N5 interconnect using Ru area selective deposition tone inversion process
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2062 since deposited on 2021-10-25
1last month
Acq. date: 2026-06-09
Citations
Statistics
Views
2062 since deposited on 2021-10-25
1last month
Acq. date: 2026-06-09
Citations