Browsing by author "Marques, Esteban"
Now showing items 1-12 of 12
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A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition
Kaneda, Yukio; Nye, Rachel; Marques, Esteban; Armini, Silvia; Delabie, Annelies; van Setten, Michiel; Pourtois, Geoffrey (2023) -
Area-Selective Deposition of Ruthenium by Area-Dependent Surface Diffusion
Grillo, Fabio; Soethoudt, Job; Marques, Esteban; de Martin, Lilian; Van Dongen, Kaat; van Ommen, J. Ruud; Delabie, Annelies (2020) -
Benchmarking First-Principles Reaction Equilibrium Composition Prediction
Marques, Esteban; De Gendt, Stefan; Pourtois, Geoffrey; van Setten, Michiel (2023) -
Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Briggs, Basoene; Hody, Hubert; Spampinato, Valentina; Franquet, Alexis; Chan, BT; Delabie, Annelies (2019) -
Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Tomczak, Yoann; Nyns, Laura; Van Elshocht, Sven; Delabie, Annelies (2018) -
Dilute Rhenium Doping and its Impact on Defects in MoS2
Torsi, Riccardo; Munson, Kyle T.; Pendurthi, Rahul; Marques, Esteban; Van Troeye, Benoit; Huberich, Lysander; Schuler, Bruno; Feidler, Maxwell; Wang, Ke; Pourtois, Geoffrey; Das, Saptarshi; Asbury, John B.; Lin, Yu-Chuan; Robinson, Joshua A. (2023) -
From fundamental insights into growth and nucleation mechanisms to area-selective deposition
Delabie, Annelies; Soethoudt, Job; Pourtois, Geoffrey; Van Elshocht, Sven; Barla, Kathy; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud (2018) -
Improving Accuracy and Transferability of Machine Learning Chemical Activation Energies by Adding Electronic Structure Information
Marques, Esteban; de Gendt, Stefan; Pourtois, Geoffrey; van Setten, Michiel (2023) -
Insight in growth mechanism of Ru ALD on dielectrics
Soethoudt, Job; Tomczak, Yoann; Grillo, Fabio; Hody, Hubert; Marques, Esteban; Van Ommen, Ruud; Altamirano Sanchez, Efrain; Delabie, Annelies (2018) -
Kinetic modeling of Ru area-selective atomic layer deposition in nanopatterns
Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Delabie, Annelies (2020) -
Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
Grillo, Fabio; Van Ommen, Ruud; Clerix, Jan-Willem; Marques, Esteban; Soethoudt, Job; Pourtois, Geoffrey; Delabie, Annelies (2021-08-11) -
Surface diffusion for defect mitigation during area-selective deposition of Ru
Soethoudt, Job; Grillo, Fabio; Marques, Esteban; Van Ommen, Ruud; Hody, Hubert; Delabie, Annelies (2019)