Show simple item record

Diode analysis of silicon substrate quality

dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorCzerwinski, A.
dc.date.accessioned2021-10-14T11:39:27Z
dc.date.available2021-10-14T11:39:27Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3832
dc.sourceIIOimport
dc.titleDiode analysis of silicon substrate quality
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage248
dc.source.endpage258
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes
dc.source.conferencedate16/09/1999
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. PV 99-16


Files in this item

Thumbnail
Name:
3801.pdf
Size:
3.806Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record