IMEC – A leading R&D partner for advancing the global semiconductor ecosystem and CMOS technology platforms

Abstract

IMEC is a leading R&D consortium with state-of-the-art 300mm cleanroom facility & equipment to enable advanced sub-7nm CMOS R&D. IMEC is an extra-ordinary place to collaborate and innovate on the most challenging topics such as logic devices, advanced lithography, memory & storage devices, interconnects, 3D integration, photonics, and new materials. IMEC’s research is shaped by access to the entire eco-system of materials and equipment suppliers, IDMs, foundries, fabless, IP suppliers and system companies. IMEC offers a neutral, open innovation R&D platform that involves suppliers more deeply and at an early stage of process step and module development with IDMs.

In addition to an advanced 300mm R&D facility, IMEC has a 200mm fab, which supports a silicon pilot line, GaN on Si platform, CMORE technologies for prototyping, and very low volume manufacturing.

After introducing IMEC, this talk will present a short overview of the advanced patterning activities and its roadmap includes the EUV development in collaboration with ASML. The second part of this talk will cover in more detail the 300mm planar CMOS technologies available for transfer from IMEC to semiconductor FABs. The key technical features of IMEC N65 poly-SiON and N28 High-K MG technologies will be discussed. Further, the application areas of 65 nm & 28 nm technology for product development will be briefly presented.