Show simple item record

Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing

dc.contributor.authorIino, Hideaki
dc.contributor.authorTanaka, Yoichi
dc.contributor.authorGan, Nobuko
dc.contributor.authorFukui, Takeo
dc.contributor.authorAkanishi, Yuya
dc.contributor.authorIwahata, Shota
dc.contributor.authorOniki, Yusuke
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2022-04-29T08:01:26Z
dc.date.available2021-12-01T15:41:31Z
dc.date.available2022-04-29T08:01:26Z
dc.date.issued2021
dc.identifier.issnn/a
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38513.2
dc.titleFunctional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
dc.typeMeeting abstract
dc.contributor.imecauthorTanaka, Yoichi
dc.contributor.imecauthorAkanishi, Yuya
dc.contributor.imecauthorIwahata, Shota
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.source.numberofpages2
dc.source.peerreviewno
dc.source.conferenceUltrapure Micro 2021 Annual Conference
dc.source.conferencedate3-5 November 2021
dc.source.conferencelocationVirtual
dc.source.journaln/a
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/38513.2*2022-04-29T07:58:34Zvalidation by library/open access desk
120.500.12860/385132021-12-01T15:41:31Z

*Selected version