dc.contributor.author | Hoenicke, Philipp | |
dc.contributor.author | Kayser, Yves | |
dc.contributor.author | Nikolaev, Konstantin, V | |
dc.contributor.author | Soltwisch, Victor | |
dc.contributor.author | Scheerder, Jeroen | |
dc.contributor.author | Fleischmann, Claudia | |
dc.contributor.author | Siefke, Thomas | |
dc.contributor.author | Andrle, Anna | |
dc.contributor.author | Gwalt, Grzegorz | |
dc.contributor.author | Siewert, Frank | |
dc.contributor.author | Davis, Jeffrey | |
dc.contributor.author | Huth, Martin | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Loo, Roger | |
dc.contributor.author | Skroblin, Dieter | |
dc.contributor.author | Steinert, Michael | |
dc.contributor.author | Undisz, Andreas | |
dc.contributor.author | Rettenmayr, Markus | |
dc.contributor.author | Beckhoff, Burkhard | |
dc.date.accessioned | 2023-01-17T11:03:55Z | |
dc.date.available | 2021-12-02T02:05:44Z | |
dc.date.available | 2023-01-17T11:03:55Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 1613-6810 | |
dc.identifier.other | WOS:000722180500001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38521.2 | |
dc.source | WOS | |
dc.title | Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Scheerder, Jeroen | |
dc.contributor.imecauthor | Fleischmann, Claudia | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Loo, Roger | |
dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
dc.contributor.orcidimec | Scheerder, Jeroen::0000-0002-9301-0392 | |
dc.date.embargo | 2022-02-10 | |
dc.identifier.doi | 10.1002/smll.202105776 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2105776 | |
dc.source.endpage | na | |
dc.source.journal | SMALL | |
dc.identifier.pmid | MEDLINE:34821030 | |
dc.source.issue | 6 | |
dc.source.volume | 18 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The authors would like to thank Vivek Rameshbhai Beladiya and Adriana Szeghalmi for depositing the HfO<INF>2</INF>-ALD deposition. Parts of this research was performed within the EMPIR projects Aeromet II and Adlab-XMet. The financial support of the EMPIR program is gratefully acknowledged. It is jointly funded by the European Metrology Programme for Innovation and Research (EMPIR) and participating countries within the European Association of National Metrology Institutes (EURAMET) and the European Union. In addition, this project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 826589-MADEin4. This joint undertaking receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, France, Belgium, Germany, Czech Republic, Austria, Hungary, Israel. K.N. acknowledges the funding by the RFBR, project number 19-29-12038. A.U. and M.R. also gratefully acknowledge financial support by DFG (Inst 275/391-1). imec gratefully acknowledges the financial support by FWO-Hercules through project AKUL/15/22. Open access funding enabled and organized by Projekt DEAL. | |