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Pupil optimization for after etch defectivity: what imaging metrics matter?
dc.contributor.author | Nafus, Kathleen | |
dc.contributor.author | Rispens, Gijsbert | |
dc.contributor.author | Maslow, Mark J. | |
dc.contributor.author | Frommhold, Andreas | |
dc.contributor.author | Franke, Joern-Holger | |
dc.date.accessioned | 2021-12-02T20:45:04Z | |
dc.date.available | 2021-12-02T20:45:04Z | |
dc.date.issued | 19/10/2021 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38523 | |
dc.title | Pupil optimization for after etch defectivity: what imaging metrics matter? | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Nafus, Kathleen | |
dc.contributor.imecauthor | Rispens, Gijsbert | |
dc.contributor.imecauthor | Frommhold, Andreas | |
dc.contributor.imecauthor | Franke, Joern-Holger | |
dc.contributor.orcidimec | Frommhold, Andreas | |
dc.contributor.orcidimec | Franke, Joern-Holger | |
dc.contributor.orcidimec | Frommhold, Andreas::0000-0001-6824-5643 | |
dc.contributor.orcidimec | Franke, Joern-Holger::0000-0002-3571-1633 | |
dc.identifier.doi | 10.1117/12.2600967 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | no | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | October 2021 | |
dc.source.conferencedate | Oct-21 | |
dc.source.conferencelocation | Online only | |
dc.source.journal | Proceedings of SPIE | |
imec.availability | Published - open access |