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Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies

dc.contributor.authorSteegen, An
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T11:40:57Z
dc.date.available2021-10-14T11:40:57Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3852
dc.sourceIIOimport
dc.titleCharacterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage4290
dc.source.endpage4297
dc.source.journalJ. Appl. Phys.
dc.source.issue8
dc.source.volume86
imec.availabilityPublished - imec


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