Publication:
Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
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1896 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-25
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Statistics
Views
1896 since deposited on 2021-10-14
1last month
Acq. date: 2026-02-25
Citations