Publication:
Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
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1894 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
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Metrics
Views
1894 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
Citations