Publication:
Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
Date
| dc.contributor.author | Steegen, An | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-14T11:40:57Z | |
| dc.date.available | 2021-10-14T11:40:57Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3852 | |
| dc.source.beginpage | 4290 | |
| dc.source.endpage | 4297 | |
| dc.source.issue | 8 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 86 | |
| dc.title | Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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