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Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
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Characterization of the local mechanical stress induced during the Ti and Co/Ti salicidation in sub-0.25μm technologies
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Date
1999
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Steegen, An
;
De Wolf, Ingrid
;
Maex, Karen
Journal
J. Appl. Phys.
Abstract
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1894
since deposited on 2021-10-14
Acq. date: 2026-01-06
Citations
Metrics
Views
1894
since deposited on 2021-10-14
Acq. date: 2026-01-06
Citations